100X/0.90 DUV Objective
应用于半导体行业的深紫外光刻物镜，常见光谱266nm, 或者其它光谱。本系列镜头只接受定制
266nm,Series DUV objective.
应用于半导体行业的深紫外光刻物镜，常见光谱266nm, 或者其它光谱。本系列镜头只接受定制
266nm,Series DUV objective.
放大倍数 Magnification | 规格型号 Model | 数值孔径 NA | 工作距离 WD(mm) | 焦距 f’ (mm) | 分辨率 R (μm) 266nm | 焦深 DF (μm) 266nm | 物方视场 on object (mm) | 像方视场 on image (mm) | 螺纹尺寸 Screw |
10x | DUV010X | 0.30 | 15.00 | 20.0 | 0.54 | 2.95 | 2.00 | 20 | 0.8” |
20x | DUV020X | 0.36 | 13.00 | 10.0 | 0.45 | 2.05 | 1.00 | 20 | 0.8” |
50x | DUV050X | 0.42 | 6.00 | 4.0 | 0.38 | 1.50 | 0.40 | 20 | 0.8” |
50x | DUV650X | 0.60 | 3.58 | 4.0 | 0.27 | 0.73 | 0.40 | 20 | 0.8” |
50x | DUV750X | 0.70 | 2.00 | 4.0 | 0.23 | 0.54 | 0.40 | 20 | 0.8” |
80x | DUV080X | 0.90 | 1.00 | 2.5 | 0.18 | 0.20 | 0.25 | 20 | 0.8” |
100X | DUV880 | 0.82 | 1.00 | 2.0 | 0.24 | 0.40 | 0.20 | 20 | 0.8” |
100X | DUV100 | 0.90 | 1.00 | 2.0 | 0.18 | 0.20 | 0.20 | 20 | 0.8” |
Contact: Herry
NanJing KOZO Optical and Electronical Instrument Co.,Ltd
Sales Dep: 19E, DongYu Building, 18 ZhengHong Street, NanJing
Factory Add: A20 MuFu, 199 East Road MuFu, GuLou District, NanJing
Code: 210005 WeChat: 13357725973
Tel: 0086-25-84716665, 84715655, 84715659
Fax: 0086-25-84715556
Mail: sales@kozo-optics.com
